Low energy electron microscopy or leem is an analytical surface science technique used to image atomically clean surfaces atom surface interactions and thin crystalline films in leem high energy electrons 15 20 kev are emitted from an electron gun focused using a set of condenser optics and sent through a magnetic beam deflector usually 60 or 90. Low energy electron microscopy leem is one of several methods for imaging surfaces thin films and nanoparticles on surfaces with low energy electrons using a cathode electron lens some of these techniques use emitted electrons excited by a variety of modes. Surface electron microscopy with low energy electrons leem spleem speleem peem etc surfaces and thin films have been among the most important subjects in science and technology during the last few decades. This book written by a pioneer in surface physics and thin film research and the inventor of low energy electron microscopy leem spin polarized low energy electron microscopy spleem and spectroscopic photo emission and low energy electron microscopy speleem covers these and other techniques for the imaging of surfaces with low energy slow electrons. First a brief description of the low energy electron microscope and its resolution limits is given then the beam specimen interactions which are important for the understanding of image formation are discussed this is followed by a presentation of some examples of the application of leem and of the use of leem instruments for other imaging methods with low energy electrons
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